Integrated CMP technology

02/01/1998

Integrated CMP technology

AVANTGAARD 776-T combines the AVANTGAARD 776 integrated CMP process capsule with the Synergy Integra wafer-cleaning system, providing a complete dry-wafer-in, dry-wafer-out solution for CMP. The system offers an alternative to conventional stand-alone CMP processing; its benefits include optimization of cleanroom space, high throughput, and a fully characterized CMP process. IPEC-Planar/OnTrak Systems Inc., San Jose, CA; ph (OnTrak) 408/952-5635 or (IPEC) 602/517-7231.