SIF4 for ion implanters

02/01/1998

SiF4 for ion implanters

With the release of a product for ion implantation using silicon tetrafluoride (SiF4), all four ion implantation gases (including arsine, phosphine, and boron trifluoride) are available as Safe Delivery Source products. Using pure gases at low pressure, SDS delivers gas based on the pressure differential between the SDS cylinder and the ion source of the implanter. SiF4 SDS gas cylinders deliver approximately the same amount of gas filled at one atmosphere as the same size of high-pressure cylinder at 400 psig. Matheson EPG/ATMI, San Jose, CA; ph 408/971-6500, e-mail [email protected].