Wafer processing and transfer system

02/01/1998

Wafer processing and transfer system

This self-contained wafer-processing and transfer system features highly reliable motion control and high-performance robotic automation. The system performs three processes in a continuous loop -a vacuum cluster tool sequence, a cleanroom sequence, and a cassette-handling sequence. The wafer transfer solution simulates wafer processing and features four robots, a servo track, wafer transfer equipment, wafer nests, cluster tool, pre-aligner, and a vision system, all under the control of the CP-9200SH system controller, which features complete synchronized control of up to 44 axes. Motoman Inc./Yaskawa Electric America, West Carrollton, OH; ph 937/847-3300, fax 937/847-6277.