USA

02/01/1998

USA

Ibis Technology, Danvers, MA, has produced what is believed to be the world`s first 300-mm SIMOX wafer, and will pursue several market development strategies under incoming president and CEO Martin Reid. The 300-mm wafer, made by Ibis partner Mitsubishi Materials, was implanted with oxygen on an Ibis 1000 system. The several producers of 300-mm ion implanters will utilize magnetic beam scanning technology licensed from Ibis. In addition, Ibis has won three R&D contracts, under which it will further develop its SIMOX-SOI technology producing wafers with thinner layers and less oxide leakage. MIT awarded Ibis a four-year, $200,000 program; the US Army awarded a $100,000 contract under the Small Business Innovative Research program, and the Defense Special Weapons Agency deal is also worth $100,000.

Semiconductor Packaging Materials (SEMX), Armonk, NY, has signed a letter of intent to acquire International Silicon Solutions (ISS), a two-year old Dallas-based polisher company with a stake in the small-diameter virgin silicon wafer niche market. ISS`s focus is said to be synergistic with that of American Silicon Products, SEMX`s polish and wafer reclaim subsidiary. ISS currently operates a 10,000-ft2 facility in Dallas and has a capacity of about 40,000, 100-mm equivalent wafers/month.

Fluoroware Inc., Chaska, MN, has donated an HTC 8020 advanced cleaning system to the International 300-mm Initiative (I300I) for 300-mm equipment demo data collection. The system is on loan at I300I`s Process Support and Metrology Center in Austin, TX, for one year. SEMATECH will also utilize the system during the loan period for cleaning 200-mm material handling products used during the manufacture of devices with 0.18-?m design rules. Meanwhile, Fluoroware has opened a 40,000-ft2 facility in Bad Rappenau, Germany. The facility, which doubles Fluoroware GmbH`s manufacturing capacity, houses an automated material handling system and primary packaging area within 2000 ft2 of Class 100 cleanrooms, as well as administrative offices and warehouse space.

Optical proximity correction (OPC) software firm MicroUnity has filed suit in US District Court for Northern California charging that Portland, OR-based Precim Inc.`s OPC software infringes two patents covering masks with "scattering bars" that address proximity effects and (with off-axis illumination) improve depth of focus. Technology Modeling Associates, which acquired Precim, called the charges meritless and said it would "vigorously defend" its position. Meanwhile, MicroUnity has entered into a licensing agreement, under which Hillelian Concepts Inc., Paris, France, will market MicroUnity`s optical proximity correction solution MaskTools and LineSweeper test reticles in Europe.

Therma-Wave Inc., Fremont, CA, has won its patent infringement claim against Jenoptik, Jena, Germany. Jenoptik is barred from selling its TWIN metrology system for use in the US. Therma-Wave filed suit against Jenoptik claiming the firm`s TWIN system infringed Therma-Wave`s six patents covering nondestructive ion implant and metal film monitoring technology used in its Therma-Probe system. In addition, Therma-Wave has received an order from Strasbaugh for an Opti-Probe 3260 film thickness measurement system.

After a US District court in Texas found Advanced Display Systems (ADS), Amarillo, TX, did not infringe a Kent State University patent for polymer-free reflective cholestric LCD technology, ADS has accelerated construction work on its FMLCD volume production facility in Amarillo. Production is expected to begin in 2Q98. Industry observers have noted that the patent win is an important victory for the company, which is developing the disputed technology as the "next generation" of LCDs.

Giga-tronics Inc., San Ramon, CA, is planning to buy robotics maker Ultracision. The stock deal, valued at approximately $5.8 million at recent share prices, follows the company`s recent acquisition of Viking Semiconductor Equipment. Approximately 517,000 Giga-tronics shares will be exchanged for all outstanding shares of privately owned Ultracision, based in Santa Clara, CA. Giga-tronics is exploring potential acquisitions in the test and measurement field for both the semiconductor and telecommunications markets.

In its second, but successful, attempt, Electro Scientific Industries (ESI), Portland, OR, has closed its acquisition of Applied Intelligent Systems Inc. (AISI), a privately held machine vision firm based in Ann Arbor, MI. The deal is valued at $57.4 at recent share prices. Last year, ESI attempted a similar acquisition of AISI, but canceled the proposal after market conditions softened. Cognex Corp. had also sought to acquire AISI.

Air Products and Chemicals, Lehigh Valley, PA, is planning to acquire Solvay America`s ultra-high purity gas, chemicals, and equipment supplier Solkatronic Chemicals. A spokesperson said Air Products would purchase all shares of Solkatronic once the transaction received all board and regulatory approvals. The Solkatronic business will be run as a separate unit within Air Products, and will retain its own identity. All 100 employees will become employees of Air Products. Solkatronic currently operates headquarters in Fairfield, NJ; runs a specialty gas manufacturing plant in Morrisville, PA; and is starting up a second production facility in Catoosa, OK. Meanwhile, Daido Air Products Electronics Inc., a joint venture of Air Products and Daido Hoxan Inc., has expanded its product portfolio to include organometallic chemicals, and specialty chemicals for CVD dielectric, metallization, diffusion, oxidation, and ion implant applications.

Trio-Tech International, San Fernando, CA, has acquired Universal Systems, a privately held wet process equipment supplier in Campbell, CA. Trio-Tech paid a combination of cash, stock, and options for Universal. Tony DiPiero, founder of Universal, has signed a long-term contract to remain as president and CEO of the company.

GOW-MAC Instrument Co. Inc., Bethlehem, PA, has acquired the assets of Olin Instruments, formerly a division of Olin Corp. Among the assets acquired were technology patents, pending sales, and service agreements for installed units. GOW-MAC will now offer instruments formerly available from Olin, including moisture analyzers and gas chromatographs.

Silicon Valley Group (SVG), San Jose, CA, has completed its stock pooling acquisition of Tinsley Laboratories, which is now a wholly owned subsidiary of SVG. The deal is valued at approximately $29.6 million at share prices as of closing. Tinsley will now operate under the name SVG-Tinsley. In addition, SVG will ship its 300-mm rapid vertical processing systems (RVP-300) to a major DRAM maker for installation in a European fab.

SI Diamond Technology, Austin, TX, has raised $5 million in capital, $1.5 million of which will be used for an equipment lease line. The remaining $3.5 million - arranged under an agreement with Gregor & Assoc., Los Angeles - will be issued in monthly cash installments of $500,000 from November `97 through April `98. Said CEO Marc Eller, "this capital infusion will allow us to add the equipment and staff necessary to increase our wafer bumping production capacity significantly over the next 60 days."

IBM will build a new developmental 300-mm wafer fab in East Fishkill, NY, and plans to begin producing DRAMs with 0.18-?m design rules by the end of 1999. Work at the $700 million facility will then shift to 0.15-?m geometries. IBM expects to develop 1-Gbit DRAM manufacturing processes for use on 300-mm substrates. Later work will address logic devices and ASICs. The new fab will be built in the Hudson Valley Research Park. The company also plans to upgrade its x-ray lithography development program to handle 300-mm wafers.

IC Works, San Jose, CA, has sold its recently upgraded 0.35-?m fab to Maxim Integrated Products Inc. The deal, valued at $42 million, includes the 150-mm fab and 5.5 acres of real estate in San Jose. Last year, IC Works and a number of foundry partners spent about $50 million to upgrade the fab from 125- to 150-mm wafers. But the industry downturn, problems with the foundry partners, and an inability to fill capacity at the facility led IC Works to seek a partner or buyer for the fab in 1997. Under the agreement, IC Works will transition fab management and capacity to Maxim over a six-month period, and Maxim, Sunnyvale, CA, will sell BiCMOS wafers to IC Works over a longer time period.

Trikon Technologies, Chatsworth, CA, has licensed two of its core technologies to Applied Materials for a much-needed infusion of $30 million. Trikon is planning deep cuts in its etch product line and is refocusing operations on its deposition technology. The moves are expected to bring layoffs, and have already triggered a relocation of corporate headquarters and several resignations of board members. A fourth-quarter restructuring of Trikon`s MORI etch operations is planned.

Applied Materials Inc., Santa Clara, CA, has received an order for $96 million worth of advanced chipmaking technology from Taiwan Semiconductor Manufacturing Co., which is planning to expand its facilities in Hsinchu, Taiwan. Also, Chartered Semiconductor Manufacturing Ltd., Singapore, ordered $73 million worth of wafer processing systems from Applied. In addition, Applied has received an order worth $35 million from Hyundai Electronics Ind. Co. Ltd., for its newest fab in Ichon, South Korea.

Veeco Instruments Inc., Plainview, NY, has shipped a $5 million order for ion beam deposition systems to three major US thin-film magnetic head (TFMH) manufacturers. The systems will be used in advanced magnetoresistive and giant magnetoresistive TFMH production. In addition, Veeco has opened a sales and service facility in Taiwan.

Tegal Corp., Petaluma, CA, has received a multisystem order worth $1.5 million from ABB Semiconductors AB, Switzerland, for its 900 series noncritical etch systems. Motorola`s Semiconductor Product Sector, Austin, TX, ordered a Tegal 6540 critical etch system. In addition, Tegal has opened a Korean sales and technical support facility.

Robotic Vision Systems Inc. (RVSI), Hauppauge, NY, is planning an expansion of its machine vision-based inspection equipment line with a proposed acquisition of Tucson, AZ-based Vanguard Automation. Under the proposed deal, valued at approximately $53 million at recent share prices, Vanguard`s shareholders will receive 3.7 million shares of RVSI stock. The transaction is expected to be accretive to RVSI`s earnings/share in 1998 and will be accounted for as a pooling of interests, and still must receive regulatory clearances and Vanguard stockholder approval.