Reticle inspection system

01/01/1998

Reticle inspection system

The Orbot RT-8000ES reticle inspection system is designed to meet the needs of the 0.25-?m, 256-Mbit device generation. Defects can be detected on the most advanced reticles, including those using optical proximity correction and phase-shift technologies. The system combines new image acquisition technology with new detection algorithms to resolve smaller defects and minimize false defect detection. With the DataExpress module, pattern data conversion time is reduced and high throughput is maintained for all mask types, regardless of data density. The system also offers LineWidth Error Detector algorithms to detect linewidth variations on the reticle down to 0.15 ?m. This advance both assists with detection of misplaced and improperly sized features such as lines and contacts, and enhances detection of edge defects. Applied Materials Inc., Santa Clara, CA; ph 408/748-5227, fax 408/986-8352, www.AppliedMaterials.com.