Fpd surface profiler

01/01/1998

FPD surface profiler

DEKTAK OSP-1100 is a stylus-based profiler with the capacity to handle flat panel displays measuring up to 1100 ? 1100 mm. The Overhead Scanning Profiler design gives highly repeatable measurements for monitoring etch and deposition process steps over the entire surface of 1100-mm substrates. The system accurately measures RGB color filters to help control and monitor film thickness uniformity during the AMLCD manufacturing process. Long scan capabilities make possible 1100-mm edge-to-edge scanning for measuring bow or thin film stress, while providing up to 65,400 data points/scan for high-resolution measurements. The low-inertia sensor, SoftScan 2, permits scans at sub-milligram forces with no damage to the sample surface, while giving a step height repeatability of 8?, 1s typical. Veeco Process Metrology, Santa Barbara, CA; ph 805/963-4431, fax 805/965-0522.