Stepper with machine vision system

01/01/1998

Stepper with machine vision system

Model 1500MVS is a compact sub-?m stepper with machine vision system (MVS) alignment. As a pattern recognition alignment system, MVS eliminates the need for larger scribe lines between each die to hold dedicated alignment targets. The 1500`s MVS capability allows it to identify targets produced for any other lithography tool, obviating the need for dedicated targets and accelerating mix-and-match implementation. The tool allows resolution down to 0.8 ?m and offers 175-nm, 3-s alignment, and a 2.0-?m DOF. Throughput is 80 wafers/hour. Ultratech Stepper Inc., San Jose, CA; ph 408/321-8835, fax 408/577-3379, www.ultratech.com.