Corrosive liquid sampling system

01/01/1998

Corrosive liquid sampling system

The CLS-900 system, which samples contaminants in hot process chemicals in wet benches, is a modular system consisting of Windows-based software and three hardware subsystems (a base control unit and up to six pairs of chemical control and fluidic modules). Fluidic modules containing liquid particle counters are dedicated to individual chemical baths in order to eliminate cross-contamination and can be physically integrated into the wet station. The base control unit synchronizes system sampling with wet station process events and communicates system data over an Ethernet 10BaseT network. Current or historical data may be represented using time plots, histograms, or tabular display formats. Particle Measuring Systems Inc., Boulder, CO; ph 303/443-7100, fax 303/449-6870.