Particle measurement

01/01/1998

Particle measurement

Models WM-1500/1700 automatically detect particles on a wafer`s surface at 0.1-?m sensitivity, using scattered laser light detection technology. The systems provide a dynamic measurement range of 0.1-5.0 ?m and high repeatability in a compact footprint of 750 mm2. Output options include x-y coordinates for relocating detected particles for analysis on other systems. The WM-1700 is designed to improve particle detection precision on coated wafers such as metal films; it provides numerous individual measurement programs for particle detection on various types of films. Topcon Technologies Inc., Paramus, NJ; ph 201/261-5410, fax 201/262-1504, e-mail [email protected].