Komatsu begins pilot 300-mm wafer production

01/01/1998

Komatsu begins pilot 300-mm wafer production

Under two separate projects, Komatsu Electronic Metals Co., Hiratsuka, Japan, is planning to expand its 200-mm epitaxial wafer line, and its 300-mm wafer pilot production line.

Komatsu recently began pilot production of 300-mm wafers at its newly built pilot production facility based at its Miyazaki Plant, Kyushu Island. But, because the Miyazaki plant does not have room for new lines, the firm is planning to set up volume 300-mm production at a new line to be built either at its Nagasaki Plant, also on Kyushu Island, or possibly at its Oregon plant.

The firm is now producing 1000 wafers/month in the pilot production line, and is planning to increase production to 5000 wafers/month by the beginning of this year.

In addition, the firm has completed construction of a new facility dedicated to 200-mm epitaxial wafer production at the Nagasaki plant. Komatsu will soon begin the second phase of the building project. When completed, the facility will have a capacity of 120,000, 200-mm epi wafers/month. -P.N.D.