New Literature
04/01/1999
Online thermal catalog
Thermal management products, including recirculating chillers, ambient cooling systems, copper and stainless steel heat exchangers, oil coolers, and cold plates, are described in this online catalog. Of interest to engineers and designers seeking cooling products, the catalog provides specifications, performance data, and selection guidelines. It also includes information on thermal design principles; product weight and liquid volume; fluid properties; and conversion factors. Downloadable drawings in PDF format and product pictures are available. Lytron Inc., Woburn, MA; ph 781/933-7300, fax 781/935-4529, web site www.lytron.com.
Surface profiler brochure
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This full-color brochure contains application and specification information on the DEKTAK SERIES V family of surface profilers for semiconductor wafer metrology. It provides a comparison of the various automated and manually loaded models, as well as a description of the use of the systems for monitoring etch, deposition, and CMP processes for both 200- and 300-mm wafers. The precision, stylus-based measurement technology of the surface profilers enables step-height repeatability for monitoring process uniformity, and long-scan capabilities (up to 200 mm) for measuring planarity or thin-film stress on wafers. Other applications such as roughness or waviness are also highlighted, along with a full listing of the software features available. Veeco Metrology Group, Santa Barbara, CA; ph 805/963-4431, fax 805/965-0522, web site www.veeco.com.
Mass flow meter video
Mass Flow Measurementellipse the Smart Way! is a 15-min video that describes the range of field-adjustment features available on the S-Series Smart Thermal mass flow meters. It also ex plains the instruments' field-validation capability, which allows operators to verify device performance and measurement accuracy in the field. These operations may be performed manually or with Smart Interface software, a menu-driven program for validating, troubleshooting, and reconfiguring a meter. Answers to commonly asked questions regarding this new technology are also provided. Sierra Instruments Inc., Monterey, CA; ph 800/866-0200, fax 831/373-4402, web site www.sierrainstruments.com.
Automatic defect classification brochure
An automatic defect classification system, the ADC NT, is described in this full-color brochure. The system, designed for use in inspection and defect review stations, is integrated into a Windows NT environment and offers object-oriented logic; accommodation to most defect detection data formats and data servers; defect learning capability; and little or no operator involvement after defect training. It also provides adaptation to different products and process layers. Leica Microsystems Inc., Deerfield, IL; 800/248-0123 or 847/405-0123, fax 847/405-0030, e-mail [email protected], web site www.leica-microsystems.com.
Stack valve/multivalve manifold literature
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New literature describes the characteristics and benefits of Stack Valve and multivalve Modular Manifold System product lines, which are designed to aid fluid delivery in CMP applications. The systems offer compact footprint; modular design; noncontaminating PTFE construction and resistance to back-pressure leakage; flexibility; and simplified installation.
As a result, they are helpful in the management of deionized water, CMP slurry, nitrogen, and other critical fluids. Osmonics, Minnetonka, MN; ph 800/848-1750, fax 612/933-0141, web site www.osmonics.com.
Online filter catalog
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Filtration Products for the Semiconductor Industry, an online filter catalog, is a resource for filter selection. The catalog has three main sections: chemical, gas, and deionized water filtration. Within each section, products are divided into three categories: elements, assemblies
and housings, and part numbers for ordering. Each section also includes a filter selection guide; and technical considerations affecting applications, filter media, construction, and filtration test methods. Compatibility guides and flow schematics are featured for each application. An additional section focuses on custom products from small, point-of-use custom filter assemblies to bulk gas skid assemblies or wastewater reclaim and recycle systems. Visitors to the site may submit their specific filtration needs to create a customized filter solution for a particular application. Pall Corp., East Hills, NY; ph 800/289-7255 or 516/484-3600, fax 516/484-3637, e-mail [email protected], web site www.pall.com.
Vapor sublimation trap brochure
A revised and expanded, six-page, color brochure describes a product that removes contaminants from a vacuum process system before they reach the pump. The HPS vapor sublimation trap catches by-products, such as ammonium chloride, that are generated in vacuum processes like CVD. The two-stage design of the instrument traps effluents in the first stage and particulates in the second. By trapping these contaminants, there is less chance of by-products backstreaming into the reaction chamber and contaminating the system or the vacuum pump. Information on applications, specifications, dimensions, part numbers, and pricing is also included in the brochure. A copy of the brochure can be downloaded in PDF format from the manufacturer's web site. MKS Instruments, Vacuum Products Group, Boulder, CO; ph 800/345-1967 or 303/449-9861, web site www.mksinst.com.
Equipment controller data sheet
This data sheet highlights the Techware IIULTRA, a universal controller hardware platform for cluster tool process module and stand-alone batch process equipment control. The tool features industry standard VMEbus architecture; high-side and low-side switching digital I/O, DeviceNet- or Profibus-distributed I/O, analog, relay, and thermocouple I/O, and graphics card hardware options; expandable serial I/O and memory capabilities; CE certification; and the ability to run ClusterLink and ControlPower process application software. Techware-IIULTRA would be of interest to companies transitioning to sensor bus and distributed I/O control architectures for physical vapor deposition, CVD, etch, epitaxy, ash, CMP, and other front-end process tools. Brooks Automation Software Corp., Richmond, BC, Canada; ph 604/214-5000, fax 604/214-5001, e-mail [email protected], web site www.brooks.com.
Specialty gases catalog
A 260-page catalog featuring a line of specialty gases, mixtures, gas generators, gas-handling systems, and related equipment is available from a gas supplier. Specialty Gases and Equipment Catalog: 35 Years of Quality Products and Services (Pub. No. 320-9825) provides detailed specifications and descriptions of new and existing products; a data section on SCOTTY transportable cylinders; troubleshooting tips; and safety guidelines. It also provides cross-referencing and indexes to help customers select the proper gases and gas-handling equipment for their analytical, environmental analysis, and process applications. Air Products and Chemicals Inc., Lehigh Valley, PA; ph 800/654-4567, fax 800/880-5204, web site www.airproducts.com.
Dry helium leak detector brochure
Highlighted in this full-color, 10-page brochure is a line of dry helium leak detectors that use oil-free pump technology to eliminate the risk of hydrocarbon contamination. Models available include the UL200 dry, a portable unit; the MODUL200, a multipurpose mobile unit; and the UL500 dry, a large, high-sensitivity unit. Detailed model selection charts suggest instruments by application - large chamber, multipurpose, sniffing, gas line testing - and by chamber volume and cycle time. Vacuum schematics, photos, and specifications are provided for each leak detector. Leybold Inficon Inc., East Syracuse, NY; ph 315/434-1100, e-mail [email protected], web site www.leyboldinficon.com.
Probe tip/holder manual
This 12-page, black-and-white reference manual describes a line of probe tips and holders. Included in the manual are charts that detail recommended applications for standard, coaxial, and triaxial probe holders; an illustration of each probe holder's configuration and a description of its physical composition and electrical characteristics; and additional charts describing the dimensional and material features of disposable probe tips. The manual also includes information on ordering custom probe holders for specific test applications, and sections on the elements of a probe and commonly asked questions. The Micromanipulator Co., Carson City, NV; ph 800/967-2426 or 702/882-2400, fax 702/882-7694, web site www.micromanipulator.com.