Macro-defect inspection

03/01/1999

Macro-defect inspection

The 2401 automated inspection system is designed to detect yield-killing macro-defects (=50 ?m) that are generated in the lithography process. Replacing current manual after-develop inspection (ADI) methodologies, in which operators miss many photo-related defects, the 2401 provides reliable and repeatable detection of critical macro-defect types, reducing scrap and preventing yield loss further downstream in the manufacturing process. Also, as part of the Intelligent Line Monitor solution, the new system allows advanced production and engineering analysis using manual macro ADI, giving continuous process improvements for maximum ROI in minimum time. KLA-Tencor Corp., San Jose, CA; ph 408/875-7039, fax 408/875-4144, e-mail [email protected].