Motion control in vacuum enviroments

03/01/1999

Motion control in vacuum environments

Motion control solutions are available for vacuum environments ranging from 10-6 to 10-9 torr. These include individual motors; stages (complete with motors, slides, and position feedback); or integrated systems that can include laser interferometers, vibration isolation, a motion platform, controller electronics, and even the vacuum chamber. Vacuum-compatible platforms are driven by either ball screws and rotary motors or by direct drive linear motors, which offer higher speeds. Piezo ceramic linear motor technology makes it possible to supply linear and rotary multiaxis systems, which are vacuum-ready to 10-z and generate very low magnetic fields - in some cases as low as 1 miligauss. Standard vacuum linear and rotary stages are available in travels from 1 to 12 in. with 360? of rotation. Custom stages with travels to 16 in. are also available. Anorad Corp., Hauppauge, NY; ph 516/231-1995, fax 516/435-1612, e-mail [email protected], w.anorad.com;

in Europe, ph 31/499-338585.