R&D surface profilers

03/01/1999

R&D surface profilers

The DEKTAK 3 Series surface profilers are stylus-based metrology systems with expanded capabilities for measuring step heights, roughness, and planarity in a wide range of R&D applications. Step height repeatability of 10 ?, 1s, allows profiling of surface features for applications such as semiconductor wafers, MEMs, hybrid circuits, and SMDs. Model 3 accommodates samples up to 5-in. diameters and has a maximum scan length of 30 mm; Model 3ST accommodates samples up to 6-in. and permits scans as long as 50 mm with a maximum of 8000 data points/scan for high horizontal resolution; and the 3ST AUTO I provides all the features of the ST plus motorized X-Y sample positioning and zoom optics. All three models include a color video microscope for viewing of the sample surface and precise positioning of the features to be measured. Veeco Metrology Group, Santa Barbara, CA; ph 805/967-1400, fax 805/967-7717, www.veeco.com.