Auto-aligning ellipsometer

03/01/1999

Auto-aligning ellipsometer

ELLIPSON is a compact process ellipsometer (no moving parts) with sub-? resolution that has applications including ICs (wafers up to 300 mm), FPDs, photoresists, and MEMs. The polarization analysis is carried out by a new parallel working optoelectronic device: the Cone Polarimeter. This performs the same function as a rotating analyzer in a conventional polarimeter or ellipsometer, but 1000 times faster without compromising accuracy. A very high measurement speed of 300 ?s, combined with a data processing time <1 ms, gives high wafer throughput and real-time monitoring. A key feature is the Autoadjust capability, which automatically detects and compensates for deviations from the optimum measurement position. Nanophotonics AG, Mainz, Germany; ph 49/6131-95854-12, fax 49/6131-95854-20, e-mail [email protected], www.nanophotonics.de.