Photomask metrology

03/01/1999

Photomask metrology

The LWM 250 UV linewidth measurement system measures linewidths using ultraviolet light at 365 nm in transmitted light mode, or white light in either transmitted or reflected mode. The i-line measurement capability in transmitted light mode enhances resolution for features as small as 0.3 ?m. Measurement time in white light using the Autofocus System is <1 sec/feature. Windows-based software allows easy job setup and on-line or off-line programming for automatic measurements. The LWM 250 UV is equipped with a video-based image processing system for measuring linewidths on photomasks, and an optional confocal module is available for inspection in incident light for increased resolution. Leica Microsystems Inc., Deerfield, IL; ph 800/248-0123 or 847/405-0123, fax 847/405-0030, e-mail [email protected], www.leicamicrosystems.com.