DUV microscope for defect inspection

03/01/1999

DUV microscope for defect inspection

The Axiotron UV is a DUV microscope that provides quality control and defect classification of =0.18-?m structures. It is ergonomic and fully automated for high-resolution imaging, using high transmission quartz-optics for illumination and imaging. "Dry" objectives for the two wavelengths - 365 nm (UV) and 248 nm (DUV) - allow fast and easy inspection in failure analysis, as well as in the production environment. Camera control, image acquisition, and navigation software provide ease of operation. Carl Zeiss Inc., Thornwood, NY; ph 800/233-2343, fax 914/681-7446, e-mail [email protected], www.zeiss.com.