Issue



Electronic throttling valve


03/01/1999







Electronic throttling valve

The Pwrflo throttling valve, for precision dispensing of CMP slurries, has 100 virgin PTFE construction of all wetted parts. A stepper motor is used to drive the one-piece diaphragm and poppet, allowing for fast operation and good flow resolution. Orifice size, process connections, and mounting can all be customized. The electronic controls are housed remote from the valve and designed on a single, compact circuit board. Electrical interface options include analog (mA or voltage) and serial (RS-232 or RS485). Maximum power consumption is 11 W. LiQuality Inc., Phoenix, AZ; ph 602/315-0338, fax 602/943-3060, e-mail [email protected], www.liquality.com.