CVD system process monitoring

03/01/1999

CVD system process monitoring

P-5K process management software, developed for Applied Materials` P5X family of CVD systems, monitors and records up to 50 deposition variables, such as lamp power, RF power, pressure, temperature, and gas flow, at two-second intervals. Data are automatically collected 24 hours/day, providing an accurate record of process parameters and events. With access to a complete data history, users can track and find problems more easily, or avert them entirely. The software can be used for process improvement and for setting limits to keep processes in spec. Jon Goldman Assoc. Inc., Orange, CA; ph 714/283-5889, fax 714/283-2884, e-mail [email protected].