Detection of contaminants in DUV

03/01/1999

Detection of contaminants in DUV

IonPro-IMS is designed for the sub-ppb to ppm detection of airborne contaminants such as total amines, total acids, ammonia, and n-methyl pyrrolidone. For use in DUV lithography, IonPro-IMS improves resist uniformity, maximizes filter life, and reduces process downtime. It incorporates ion mobility spectrometry (IMS) technology with an internal four-channel multipoint sampling system for easy monitoring in and around a DUV track and stepper. Molecular Analytics, Sparks, MD; ph 800/635-4598 or 410/472-2146, fax 410/472-2156, e-mail [email protected].