Mechanical convection cleanroom ovens

02/01/1999

Wastewater treatment technology

EnChem is a proprietary polymer process allowing selective filtration of both dissolved and suspended contaminants in CMP, fluorinated chemistries, and copper interconnect applications. It is engineered to treat CMP wastewater streams to remove H.F., silica, copper, tungsten, alumina, and silicon materials. The system will replace processes used in copper electroplating waste processing and is more effective than electrowinning copper waste. Unlike traditional filtration systems, EnChem can treat the combined waste streams of electroplating solutions, wafer rinse water, and CMP slurry in a single process. Microbar Inc., Sunnyvale, CA; ph 408/542-9066, e-mail [email protected].