Dual-channel chiller systems

01/01/1999

Dual-channel chiller systems

These single- and dual-channel chiller systems are plug-compatible with Lam Research and Applied Materials etchers. Systems are available for circulation of either DI water or Galden/Fluorinert fluids, and feature magnetically coupled gear pumps and an O ring-based seal system to ensure reliable leak-free temperature control. Up times >99% can be documented, and the systems are fully SEMI-S2-93 and CE certified. Bay Voltex Corp., Livermore, CA; ph 925/606-6293, fax 925/606-6297.