In situ gas analyzer

01/01/1999

In situ gas analyzer

Process Sense is a compact, low-cost, quantitative in situ sensor for determining gas composition within a production feed, process tool, or exhaust gas line. The sensor features a large dynamic range, fast response, low detection limits, large wavelength range, and lifetime calibration. It uses infrared absorption - changing filters is all that is necessary to measure different gases - and increases throughput and reduces consumables by optimizing chamber clean and process etch endpoint, even in remote plasma applications. Exhaust gas monitoring for fault detection reduces scrap and downtime; feed gas monitors ensure proper composition while detecting contamination. The abatement process can be optimized and monitored, reducing costs and unwanted emissions. On-Line Technologies Inc., E. Hartford, CT; ph 888/384-7888 ext 110 or 650/424-8559, www.online-FTIR.com.For REE info circle 000