ASM provides furnace for 300-mm

01/01/1999

ASM provides furnace for 300-mm

ASM Europe B.V., Bilthoven, The Netherlands, a subsidiary of ASM International, has shipped its A412 dual reactor vertical furnace for 300-mm processing to Selete, Yokohama, Japan, for evaluation. The system includes an LPCVD silicon nitride and TEOS tube, and an LPCVD in situ doped polysilicon tube, configured with pre-purged FOUP cassettes and a nitrogen-purged mini-environment. The system is capable of 130-nm device technology processing, and is one of five dual tube systems that will be shipped to various customers worldwide after an evaluation of the A412 alpha systems at the I300I and at Wacker Siltronic, a 300-mm wafer maker in Burghausen, Germany.