300-mm wafer analysis

12/01/1996

300-mm wafer analysis

The ECO/RS analyzer is an FT-IR analysis tool that automatically profiles 300-mm wafers and collects measurements using standard or user-defined profile patterns. It operates in both reflection and transmission modes for maximum versatility and productivity in R&D labs or cleanroom environments. The dual-mode operation supports a full range of FT-IR applications, including analysis of bulk silicon impurities, epitaxial film thickness, and dielectric film dopants. The ECO/RS has a very small footprint, a Windows 95 operating sys-tem, and powerful OMNIC application development and data analysis software. Nicolet Instrument Corp., Madison, WI; ph 608/276-6100, http://www.nicolet.com/