Intra tool buffer

12/01/1996

Intra tool buffer

The Intra Tool Buffer (ITB) is a tool automation solution that buffers work-in-process within process tools and loads/unloads wafer carriers to and from this company`s new 300-mm door-opening load port to ensure continuous wafer availability. The system offers the user increased tool utilization and throughput, lot tracking, and empty carrier storage. The ITB provides the process tool with standardized intrabay interfaces, allowing integrated tool loading from the AeroTrak overhead monorail transport system and from automated guided vehicles. The system is compatible with all SEMI standard pods and carriers and complies with the E-15 interface standard for I/O ports for 300-mm-wafer process tools and automated material-handling systems. PRI Automation Inc., Billerica, MA; ph 508/670-4270, fax 508/663-9755.