Point-of-use scrubber

12/01/1996

Point-of-use scrubber

The XGC point-of-use scrubber is a high-efficiency, low-energy system designed for the abatement of semiconductor effluent gases and particulates. The scrubber contains three abatement stages for thorough scrubbing of highly toxic and pyrophoric gases from process effluent gas streams. The three stages are a spray chamber, an Eductor Venturi stage, and WATERWEB Mesh, which consists of thousands of microventuri passages for maximum scrubbing efficiency. The XGC features a blowerless design for the safe use of hydrogen carrier gas, and an inlet arrestor that prevents backstreaming of gas and humidity to inlet piping. A small footprint, clear PVC construction, and flanged sections, drain, and sample ports minimize installation and maintenance time. Typical applications include CVD, PECVD, plasma etch, and RIE. Misonix Inc., Farmingdale, NY; ph800/645-9846.