SMIF wafer transfer system

12/01/1996

SMIF wafer transfer system

SMIF-LPO 2200 overcomes the problems of integrating SMIF I/Os and SMIF-Pods with process tools that have no provision for wafer cassette indexing during wafer transfer. It is designed to meet the need of equipment manufacturers to integrate SMIF into their process systems while maintaining an ergonomic load height, and it will support a reduced 200-mm interface footprint due to direct system integration. In addition, wafer pro-trusion sensing and automatic wafer reseating provide a comprehensive SMIF solution. LPO-2200 addresses the challenge of tools with a z-axis wafer handler and stationary wafer cassette platform. Using SMIF-pods for wafer transfer, the system offers an ultraclean (below Class 1) wafer retrieval environment. It is compatible with the SMART-Traveler paperless lot-tracking system. Asyst Technologies Inc., Fremont, CA; ph 510/661-5000, fax 510/661-5160.