Source does have automatic tuning feature

12/01/1996

Source does have automatic tuning feature

Our product, the MPDR 325I microwave plasma processing source, was featured in the cover article of the August 1996 issue ("A comparison of HDP sources for polysilicon etching," J.T.C. Lee, p. 63). Dr. Lee`s only criticism of our unit was the fact it did not have an auto tuning feature. However, the auto tuning feature has been available since August 1995.

Doris M. Apel

Technical Sales and Marketing

Wavemat Inc., Plymouth, MI

Dr. Lee reports that the work for his article was completed prior to the auto tuning feature becoming available, and that this feature certainly enhances reactor performance from a manufacturing standpoint.