Probe station

11/01/1996

Probe station

The CHECKMATE analytical probe station has been designed to be field modifi-able to any of four configurations. The primary difference in the configurations is the sophistication of stage movement. Each variation can provide state-of-the-art design verification and failure analysis of ICs with sub-?m technology. The four configurations are: manual - featuring sub-?m resolution of the 8-in. chuck and microscope stage; motorized - providing motorized control of the microscope stage and wafer chuck; a third configuration, which incorporates a precision dial and joystick controller; and the version of CHECKMATE that integrates powerful navigation software in a Windows environment. Signatone, Gilroy, CA; ph 408/848-2851, fax 408/848-5763.