Opticalinspection section

11/01/1996

Optical inspection station

This optical inspection station, the INS 100, uses an integrated handler workstation with a custom stage that can be adapted to most inspection microscopes. All standard contrast techniques are available, from brightfield to white light confocal imaging. The handler system provides safe and fast wafer transport through an internal testing system that continuously searches for wafers. In addition, the INS 100 includes a cassette mapper that prevents cross slot and double feeds. A dual-arm design provides faster wafer exchanges than single--arm systems. Leica Inc., Deerfield, IL; ph 800/909-3935, fax 201/236-5917.