Waste gas removal

11/01/1996

Waste gas removal

The CLEANVENT cartridge allows at-source waste gas removal directly within the gas supply cabinet. The unit, which passively removes hazardous purge gases by chemical conversion to stable solids, is typically fitted upstream of the cabinet`s venturi vacuum generator. Cartridges are available for all semiconductor gases; the vessels can be refilled periodically by local suppliers. CS-GmbH, Ismaning, Germany; ph 49/89-962400-0, fax 49/89-962400-22.