Process gas flow control

11/01/1996

Process gas flow control

Microleak gaskets give accurate gas flow control in process gas lines. Flow rates that air at 15 psig are achieved from 0.004 cc/min to 18 l/min using these orifices, with diameters ranging from 0.5 to 1000 ?m. Precision calibration of the gaskets gives interchangeability and repeatable control. Lenox Laser, Glen Arm, MD; ph 410/592-3106, fax 410/592-3362