Issue



High-performance inflatable seals


11/01/1996







High-performance inflatable seals

The inflatable Pneuma-Seal offers rapid sealing in most semiconductor equipment applications. Suitable for wafer furnaces, wet or dry process chambers, vacuum environments, and actuator mechanisms, the seal features fast sealing and unsealing, simplified hardware, and a variety of profiles and compounds for use in a wide range of environments. Fabricated from synthetic rubber materials, it addresses sealing problems with over 500 designs of inflatable, extruded, or molded rubber sections developed. Presray Corp., Pawling, NY; ph 914/855-1139 or 714/751-2993.