High-performance inflatable seals
11/01/1996
High-performance inflatable seals
The inflatable Pneuma-Seal offers rapid sealing in most semiconductor equipment applications. Suitable for wafer furnaces, wet or dry process chambers, vacuum environments, and actuator mechanisms, the seal features fast sealing and unsealing, simplified hardware, and a variety of profiles and compounds for use in a wide range of environments. Fabricated from synthetic rubber materials, it addresses sealing problems with over 500 designs of inflatable, extruded, or molded rubber sections developed. Presray Corp., Pawling, NY; ph 914/855-1139 or 714/751-2993.