Issue



Gallium diffusion furnace


11/01/1996







Gallium diffusion furnace

This gallium diffusion furnace is a five-zone model for junction diffusion in the manufacture of power semiconductor devices; it includes the Eurotherm PC3000 control system. This unit controls all aspects of the furnace - e.g., temperatures, gas flow, and sequencing - and is capable of holding more than 100 process recipes at each furnace tube. Hitech Furnaces Ltd., Sutton Coldfield, UK; ph 44/121-352-1404, fax 44/121-353-4311