Cassette transfer system

11/01/1996

Cassette transfer system

The 5500 series cassette transfer system (CTS) is an automated, microprocessor-controlled unit that provides product-handling capabilities without the complexity of a fully robotic bench. The unit is sealed and purged to keep the interior components moisture-free, and all exterior moving parts are coated with chemical-resistant Halar. The 5500 CTS can transport dual 4-, 5-, 6-, or 8-in. wafers safely and rapidly between process tanks. The transfer system has a full 30-lb lift capability and can provide heights from 12 to 15 in. Incorporated into the rotary arm are anti-swing features to ensure product stability, a 3-sec tank-to-tank, high-speed transfer ability, and mechanical agitation to suit individual process requirements. The CTS can be designed into a modular wet bench or added to an existing bench. SCI Systems Inc., Huntsville, AL; ph 205/882-4225, fax 205/882-4407