Optical character recognition Optical character recognition

11/01/1996

Optical character recognition

This optical character recognition (OCR) system, designed for integration into Lam`s Rainbow and TCP 9600 etchers, automatically reads a lot wafer identification number on a wafer, prior to entry into the etch chamber, and passes that number to a computer or network. The system integrates the vision system and the image processing into a compact package, eliminating the need for another PC to run the OCR software. The system attaches directly on the top side of the cover of the etchers. Image processing software detects the presence of the wafer, reads the identification number, verifies the number and checks its validity, and transmits the number via an RS 232 output, achieving real-time monitoring of the process. Reading ability is enhanced as the OCR system finds the wafer flat and adjusts the readings for the error in wafer placement. In addition, the OCR software uses an automatic gain control that tunes the camera to the light reflected off the wafer. OAI Inc., Milpitas, CA; ph 408/263-4944, fax 408/263-6389.