Mask inspection

11/01/1996

Mask inspection

The Data Express system enhances the ability of the RT-8000 reticle inspection system to inspect complex masks such as OPC, PSM, and 64- and 256-Mbit DRAMs without compromising throughput or sensitivity. The system preserves the hierarchy of pattern data files while searching for more compaction in the data. The data remains in its compacted form until it is compared with the scanned mask image. This allows the system to handle smaller reference files, overcoming storage and data-transfer limitations and greatly reducing the pattern data conversion time. Data Express employs CATS software and supports all commonly used database formats. The scalability of the module allows the addition of components in parallel; this architecture will permit the multiplication of the data transfer rate for future inspection needs of even denser masks. Orbot Instruments Inc., Yavne, Israel; ph 972/8942-3633, fax 972/8942-1644.