Excimer laser
11/01/1996
Excimer laser
The COMPex 150T excimer laser offers high output power (up to 20 W), high pulse energy (up to 450 mJ), narrow linewidth (<3 pm), low beam divergence (<0.2 mrad), and high temporal and spatial coherence. A single gas fill produces up to 107 laser pulses. The laser is fully computer-controllable-all relevant system parameters are completely adjustable by software. Comprehensive user menus and automatic self-diagnosis with status and error messages make the laser easy to use. Lambda Physik GmbH, Gottingen, Germany; ph 49/551-6938-154, fax 49/551-68691.