Applied Komatsu Technology Inc. Applied Komatsu Technology, Inc.

11/01/1996

Applied Komatsu Technology Inc. (AKT), Kobe, Japan, has shipped its 75th TFT system. AKT produces plasma enhanced CVD, PVD, and etch systems for active matrix liquid crystal displays. In July, the AKT PECVD 3500 system received the grand prize award for display manufacturing equipment at the Fine Process Technology Exhibition and Seminar in Tokyo. The company`s single-substrate, multichamber system architecture has played a decisive role in AKT`s market position, complementing AKT`s advanced TFT process technologies. The architecture has received US patent 5,512,320, while patent applications are pending in Japan and Europe.