Lithography minienvironment

11/01/1996

Lithography minienvironment

TOTAL CONTROL LithoGuard 2000 minienvironment is a fully isolated, ultraclean recirculatory enclosure system with tight controls for temperature, humidity, and ESD. It is suitable for protecting semiconductor lithography processes, providing a Class 1 or better (at 0.12 ?m) contamination-free environment. The stabilities of the temperature and relative humidity inside the minienvironment are, respectively, ?0.05?C and ?0.5% RH. The modular system can be configured to accommodate a variety of installation requirements. Intelligent Enclosures Corp., Norcross, GA; ph 770/564-5685, fax 770/564-5548