Vacuum cassette elevator for 300 mm Vacuum cassette elevator for 300 mm

11/01/1996

Vacuum cassette elevator for 300 mm

The VCE 5 vacuum cassette load lock elevator, for loading and unloading 300-mm wafers into vacuum process tools, satisfies the need for vacuum interfaces to both cluster tools and standalone tools in next-generation fabs. The fully modular design allows equipment manufacturers to interface with a wide variety of factory automation or human operator arrangements. VCE 5 gives semiconductor manufacturers the opportunity to standardize fully the tool end of the transport-to-tool interface in next-generation fabs. VCE 5 incorporates a modular drive mechanism capable of 13- and 25-wafer capacities. Brooks Automation Inc., Chelmsford, MA; ph 508/262-2400, fax 508/262-2500.