Transparent film metrology

12/01/1997

Transparent film metrology

SpectraLASER 300 XL is a 300-mm transparent film metrology tool that employs multidomain production ellipsometry (Multi-Domain PE), which capitalizes on both multiple angle of incidence and multiple wavelength data to characterize 300-mm wafer processes and monitor them on a routine basis. Multi-Domain PE, with UV reflectance, provides the analytical capabilities of research-grade spectroscopic ellipsometry, the accuracy of laser ellipsometry, and the throughput and spot size required for production. Ensuring 0.15 ? repeatability, the 300 XL delivers a small (5 ? 10 ?m) laser measurement spot, high optical intensity, and throughput of 80 wph. It uses individual lasers at 458, 633, 780, and 905 nm for broad spectral coverage, plus a DUV reflectometer to characterize both thick and thin films in CMP, CVD, diffusion, etch, and lithographic applications. Rudolph Technologies Inc., Flanders, NJ; ph 973/691-1300, fax 973/691-5480, www.rudolphtech.com.