FIB/SEM workstation

12/01/1997

FIB/SEM workstation

The DualBeam XL830 FIB/SEM workstation`s SEM column provides 3-nm resolution from 1-30 kV. The new electron column offers balanced-field, in-lens detection to give good topographical detail, down-hole visibility, and enhanced grain boundary imaging. Rapid FIB milling for cross-sectioning, and imaging with the SEM at very high resolution are completely simultaneous operations. The Predictive User Interface keeps the sub-?m defect in the field of view during various operations and while viewing from various angles. The operator can switch directly between field-free mode (providing large-area, low-magnification images with low distortion levels and large depth of field) and the immersion mode, for the highest resolution imaging of sub-0.25-?m features and defects. FEI Co., Hillsboro, OR; ph 503/640-7500, fax 503/640-7509, e-mail [email protected].