Issue



Thin film characterization


12/01/1997







Thin film characterization

Iris 200 is a data analysis review station for thin film characterization that simultaneously generates film thickness and n and k spectra (from 190 to 900 nm) from raw ellipsometric data and/or from raw reflectance data. It has an operating system with intuitive GUI software for easy data processing and transfer, and takes only seconds to characterize even multilayer thin film structures. n&k Technology Inc., Santa Clara, CA; ph 408/982-0840, fax 408/982-0252, e-mail [email protected].