Deep ultraviolet coating

12/01/1997

Deep ultraviolet coating

This DUV, high-reflectance coating, #1900, is optimized for 190-195 nm, with good average reflectance throughout the UV and visible to near infrared wavelengths. Reflectance specifications for the coating are =88% reflectance for 190-195 nm and =85% reflectance for 200-600 nm at normal incidence. Applications for #1900 include use in DUV spectroscopic ellipsometry thin film measurement systems. Also available are other enhanced aluminum broadband high-reflectance coatings optimized for wavelengths including 120, 160, 200, and 250 nm. Acton Research Corp., Acton, MA; ph 978/263-3584, fax 978/263-5086, e-mail [email protected].