Chemical delivery module

12/01/1997

Chemical delivery module

The ChemFill 1200 series - chemical delivery and purification systems providing mid-range flow rates - uses an application-specific platform that can be configured with one of four delivery engines, and it features advanced particle-removing technologies. Two models in the series are available: the ChemFill 1210 module dispenses chemical via pressure-vacuum vessels; ChemFill 1230 features pump pulse-dampener technology. Both provide continuous filtered recirculation of chemical. All critical process components are reliability tested, guaranteeing 99.5% uptime for uninterrupted chemical delivery to the fab. FSI International, Chaska, MN; ph 612/361-7648, www.fsi-intl.com.