Particle deposition system

12/01/1997

Particle deposition system

The PDS-80 particle deposition system is configured for 150-, 200-, and 300-mm wafers and other substrates. The Class 1 cleanroom-compatible system features a standard deposition range of 0.8-2 ?m, and optional capabilities extend the range to 5 ?m. The PDS-80 can automatically perform full and half depositions. The system will help fabs and instrument manufacturers to conform to the requirements of SEMI Standard E14-93 for meeting particles/wafer pass specifications. VLSI Standards Inc., San Jose, CA; ph 408/428-1800, fax 408/428-9555, www.vlsistd.com.