Ion milling probe

12/01/1997

Ion milling probe

IMP is an ion milling probe for endpoint detection in thin-film etching applications. It features a high-performance quadrupole mass spectrometer, energy analyzer, and pulse ion counting detector for direct analysis of etch process secondary ions. Operating under the control of MASsoft software, the IMP provides for automatic selection of the etch products from an internal library of device structures. During analysis, IMP`s rapid response to step changes in etch product signal provides for precise determination of endpoints and material interfaces. Integration with the production tool then ensures reduced undercutting and overetching, maximized feature control and selectivity, and complete etching. Also, the probe operates as a residual gas analyzer for base pressure analysis, process gas monitoring, and leak detection. Hiden Analytical Ltd., Warrington, UK; ph 44/1925-445225, fax 44/1925-416518, e-mail [email protected], www.hiden.co.uk