Data collection architecture

12/01/1997

Data collection architecture

These enhancements to the architecture of ModelWare/RT software improve its data collection speed and flexibility with a powerful scripting and configuration engine. The new architecture includes abilities for: more flexible configuration for a wide range of tools; enhanced support for cluster tools for up to 12 chambers; multiple data collection sessions; a configurable event-response engine; application of functions to incoming equipment data values such as multiplying, adding, and more complex operations; and full SECS passthrough between a host computer and the tool. Triant Technologies Inc., Vancouver, Canada; ph 800/667-3038 or 604/684-4226, fax 604/684-2099, e-mail [email protected].